MEMSNANO-2005 International conference on MEMS and Semiconductor Nanotechnology December 20-22,2005,IIT Kharagpur,India MEMS BASED NANOCRYSTALLINE METAL OXIDE GAS SENSORS FOR COALMINE ENVIRONMENT P.Bhattacharyya,S.Sen,A.Chatterjee, S.Das, K.Basu, A.Pal and H.Saha
نویسندگان
چکیده
Conventional Metal Oxide gas sensors commonly used for sensing inflammable hydrocarbon gases and other toxic gases suffer from the two limitations, viz. (a) their relatively high operating temperature (≥300° c) and (b) large power dissipation (≥1 Watt). In this paper we establish that use of nanocrystalline metal oxide in place of polycrystalline metal oxide lead to large increase of free surface energy which in turn leads to lower adsorption isotherm and large surface concentration and hence enhances reaction rate even at a much lower temperature. Moreover a simple software tool has been developed to analyze the heat dissipation (power consumption) components and to design optimum microheater for a particular operation.
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